Piezocon Gas Concentration Sensor

The industry standard for reproducible vapor delivery control the piezocon gas concentration sensor has become the industry standard among semiconductor manufacturers for accurate monitoring and reproducible delivery control of chemical precursor vapors and dopant gases in cvd and mocvd process tools.

Piezocon gas concentration sensor.

The apex gas mixing system powered by veeco s production proven piezocon gas concentration sensor allows manufacturers to reduce production costs by purchasing lower cost higher concentration gases then diluting at the point of use to immediately reduce gas purchase costs by as much as 60 percent. Piezocon gas concentration sensor and delivery control system data sheet. Piezocon gas concentration sensor. Wafer scrubber data sheet.

Apex gas mixing system. The complete solution for precision point of use gas mixing the apex gas mixing system powered by veeco s production proven piezocon gas concentration sensor allows manufacturers to reduce production costs by purchasing lower cost higher concentration gases then diluting at the point of use to immediately reduce gas purchase costs by as much as 60 percent. Piezocon gas concentration sensor. Apex gas mixing system the apex gas mixing system reduces production costs by allowing you to purchase lower cost higher concentration.

Dry film resist stripping data sheet. Flux removal and cleaning data sheet. The piezocon gas concentration sensor delivery control system has become a standard within the semiconductor equipment industry for accurate monitoring and reproducible delivery control of chemical precursor vapors and of dopant gases to cvd and mocvd process tools. It generates gas mixtures for tighter process read more.

Piezocon brings critical control to cvd mocvd applications last update. Out of a 1 percent dopant premix the piezocon precision gas mixing system can generate a 50ppm dopant gas mixture with a 0 5ppm or better concentration control tank to tank and over the shelf life of the tank. With over 2 800 installations worldwide the piezocon system. Effective post tsv drie wet clean process for tsv applications.

Get an improved gas mixture concentration with the precision gas mixing system. Active control of mixture concentration compensates for changes or drifts in upstream concentration.